$181.50 $363.00
  • Revision:2nd Edition, April 2006
  • Published Date:April 2006
  • Status:Active, Most Current
  • Document Language:English
  • Published By:Inst. of Environmental Sciences and Technology (IEST)
  • Page Count:28
  • ANSI Approved:No
  • DoD Adopted:No

  • This Recommended Practice (RP) provides a basis for establishingpersonnel procedures and the development of training programs forcleanrooms and other contamination controlled environments.


    Most cleanrooms need people to perform tasks associated with theoperations being performed. Even fully automated operations requirepersonnel to tend or service automated systems. People and theirstreet clothing generate contamination, therefore an effectivecontamination control system should be adopted to minimize therisks to the product, process yields, or the cleanroom environment.Also, because activities within the cleanroom can carry in,generate, stir up, or transfer contamination from place to placewithin the cleanroom, a system of operational protocols should bedeveloped, enforced, and monitored to maintain the proper controls.ISO 14644-5 identifies the basic requirements for addressing theseoperational issues. These normative requirements should beaddressed to assure a minimally thorough operational cleanroomprogram.

    This RP serves as a guide for developing a program to managecontamination caused by or associated with the people, processes,and tooling in the cleanroom. Contamination may be generated by thepeople or the activities they perform, or may be transported intothe clean environment with the materials brought into it. Programsfor the control of personnel-generated contamination are complex.In this document, the subjects often overlap. In some areas, thereis deliberate redundancy between two sections. The reader will findthe most specific and detailed information under the topic headingfor a particular subject. However, related subject areas areincluded in the general discussions when these subject areas arepertinent to or have an effect on the main topic. References tosections of this document that provide more thorough coverage areincluded.

    This RP provides a general description of the elements essentialto a contamination control program as well as specific proceduresfor minimizing human-sourced contamination. The rationale behindthe procedures and elements is discussed. The intent is to informthe user while assisting with the preparation of components of theprogram. This document specifies commonly accepted procedures andrecommendations, and also points out considerations that should bemade for a thorough and successful program.

    Because there is a wide variety of degrees of cleanliness forcleanrooms (and differences in potential contaminants from whichclean environments should protect products), some aspects of theprocedures will be too stringent for some applications, whileinsufficient for others. A program should be expected to have asignificant amount of individuality. What works well for onecompany or industry may not be acceptable in others because offactors such as local culture, facility constraints, large workforces, and government regulations.

    The user is responsible for choosing the elements and degree ofcompliance that best suit the specific situation. In some cases,the advice of a contamination control consultant may be sought.

    The science of contamination control is continuously evolving.Users are encouraged to find improved methods for controllingcontamination appropriate for their needs and to share these withthe contamination control community.

    It is helpful to use data or experiments to evaluate whether aprocedure is necessary or effective. Test methods are beyond thescope of this document.

    It should be noted that there are several references availablethat provide a thorough background on contamination controltheories, practices, and considerations. These references may befound in the text of this document and should be consulted when theuser requires more detailed information.